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A Practical Guide to Optical Metrology for Thin Films, by Michael Quinten
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A one-stop, concise guide on determining and measuring thin film thickness by optical methods.
This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods.
Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromagnetic radiation in space and matter. The main topic of this book, the determination of the thickness of a layer in a layer stack by measuring the spectral reflectance or transmittance, is treated in the following three chapters. The color of thin layers is discussed in chapter 6. Finally, in chapter 7, the author discusses several industrial applications of the layer thickness measurement, including high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, transparent conductive films, oxides and polymers, thin film photovoltaics, and heavily doped silicon.
Aimed at industrial and academic researchers, engineers, developers and manufacturers involved in all areas of optical layer and thin optical film measurement and metrology, process control, real-time monitoring, and applications.
- Sales Rank: #3779366 in Books
- Brand: Brand: Wiley-VCH
- Published on: 2012-11-28
- Original language: English
- Number of items: 1
- Dimensions: 9.50" h x .54" w x 6.80" l, 1.05 pounds
- Binding: Paperback
- 224 pages
- Used Book in Good Condition
Review
“A one-stop, concise guide on determining and measuring thin film thickness by optical methods.” (The German Branch of the European Optical Society, 1 November 2013)
“It would be a useful read for industrial and academic researchers, engineers, developers and manufacturers in areas of optical layer and thin optical film measurement and metrology.” (Optics & Photonics News, 1 November 2013) From the Back Cover
This book presents a comprehensive overview of optical metrology for thin film thickness determination by optical means, from electrodynamic basics, and hardware components, to methods of measurement and evaluation. The author, an expert in the field with both academic and industrial experience, concentrates on the spectral reflectance measurement with miniaturized spectrometers, one of the most flexible techniques for inline and offline thickness determination.
About the Author
Dr. Michael Quinten works as Head of Research and Development Sensors at FRT GmbH in Bergisch Gladbach, Germany. Having obtained his diploma degree and Ph. D. in physics (1989) at the University of Saarland, Saarbruecken, Germany, he joined the Technical University RWTH Aachen in 1990 to work as a physics fessor. He then spent four years at several universities in Graz (Austria), Chemnitz, Aachen, Saarbruecken and Bochum (Germany). During his academic career, he authored 50 scientific publications on optical properties of nanoparticles, nanoparticle materials, and aerosols. In 2001, he joined the ETA-Optik GmbH, Germany, where he first worked in research and development of integrated optics components, and later became a product manager in the Colour and Coatings Division. During this period, he became expert in optical layer thickness determination. In 2007, he moved to FRT GmbH where he is responsible for the optical sensor technology division. He is the author of Optical Properties of Nanoparticle Systems: Mie and Beyond, Hardcover, 502 pages, Publisher: Wiley-VCH; 1 edition (March 15, 2011), ISBN10: 9783527410439, ISBN-13: 978-3527410439.
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